发明名称 PLASMA TORCH AND SCRUBBER SYSTEM USING THE SAME
摘要 A plasma torch capable of effectively burning the wasted gas and a scrubber system using the same are provided to prevent the supply opening which supplies the plasma gas from being blocked by the particle mixed in the wasted gas by separating the hole for plasma gas supply and the hole for the waste gas supply. The plasma torch(100) comprises the cathode electrode, the first anode electrode, and the second anode electrode. The cathode electrode is positioned on the top. The first anode electrode is positioned under the lower part of the cathode electrode. The first anode electrode comprises the first penetration hole. The second anode electrode is positioned under the lower part of the first anode electrode. The second anode electrode comprises the first penetration hole, the second penetration hole, and the wasted gas inlet hole(150). The second penetration hole is connected to the first penetration hole.
申请公布号 KR20080105377(A) 申请公布日期 2008.12.04
申请号 KR20070052891 申请日期 2007.05.30
申请人 CLEAN SYSTEMS KOREA, INC. 发明人 KIM, HYUNG GEUK;LEE, SANG JUN;LIM, BYEONG DEOK;KIM, SI HYUN;JEONG, SANG HYUN;HAN, JAE HEE
分类号 H01L21/02 主分类号 H01L21/02
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