| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating device in which a coating liquid ejected outside a substrate does not effect on the substrate when coating the coating liquid in a liquid columnar state on the substrate. SOLUTION: This is the coating device to eject the coating liquid in the liquid columnar state which has a linear rod state in the vertically downward direction onto the substrate and to coat the coating liquid. A nozzle ejects the coating liquid from its tip part in the liquid columnar state. A stage places the substrate on its upper face. In a space on the stage, a nozzle moving mechanism reciprocatingly moves the nozzle in a direction crossing the stage face. When the nozzle moving mechanism moves the nozzle to a position off on the stage along the crossing direction while ejecting the coating liquid from the nozzle, a liquid receiving part receives the coating liquid ejected outside of the stage from the nozzle. The liquid receiving part contains an adsorbent material. The adsorbent material adsorbs and retains the coating liquid at a position in the vertically downward direction from the tip part of the nozzle arranged at the position separated from above the stage. COPYRIGHT: (C)2009,JPO&INPIT
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