| 摘要 |
PROBLEM TO BE SOLVED: To securely correct wavefront aberrations caused by an interchangeable optical element. SOLUTION: A microscope 100 has an imaging apparatus 17 which detects light passed through a sample 1 and an interchangeable objective lens 14, and then provides an observation image of the sample 1 based upon a detection result of the imaging apparatus 17, and is characterized by having a deformable mirror 15 which performs wavefront modulation on the light passed through the objective lens 14 and a stage 18 which moves the deformable mirror to position the center position 15c on the deformable mirror 15 onto the optical axis OA of the objective lens 14. COPYRIGHT: (C)2009,JPO&INPIT
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