| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an edge defect detecting method for accurately detecting edge defects whose density difference between a pattern is minute without use of a reference image. <P>SOLUTION: The edge defect detecting method of the invention is provided with the process of enhancing the edge defects at edges E1-E3 in a plurality of the directions D1-D3 in the pattern P, and obtaining edge defect enhancement values by applying an edge defect enhancement filter to a captured image. The edge defect enhancement filter selects a smaller density if two comparison pixels X1, X2 has different densities, selects one of them if they have the same density, and subtracts the density of an object pixel A, and considers a difference as an enhancement calculation value. The edge defect enhancement process applies the edge defect enhancement filter in directions D1-D3, and considers the maximum of the enhancement calculation values obtained in the directions D1-D3 as a defect enhancement value at the object pixel A. <P>COPYRIGHT: (C)2009,JPO&INPIT |
