| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation detector 11 of higher manufacturability free from such a problem as found in using an electrostatic chuck and a vacuum chuck, when a plurality of photoelectric converting substrates 14 are arranged on a base 12 to increase an area. SOLUTION: This radiation detector has a structure where edge portions of photoelectric converting substrates 14 are projected from an edge portion of the base 12. The edge portions of the photoelectric converting substrates 15 projecting from the edge portion of the base 12 are held by a mechanical chuck mechanism, and thereby the photoelectric converting substrates 14 are carried on the base 12 and disposed while the chuck mechanism is prevented from interfering with the base 12. COPYRIGHT: (C)2009,JPO&INPIT
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