| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for acquiring a two-dimensional distribution image of each to-be-analyzed object at a high spatial resolution by TOF-SIMS, and a composition analysis method of the object with regard to a method for acquiring information from the to-be-analyzed object. SOLUTION: The method includes: the process (1) of providing an autoreactive material to the to-be-analyzed object on a base substance so as to promote an ionization of the compositions; the process (2) of irradiating the to-be-analyzed object with a primary beam, ionizing and flying the compositions in the presence of the autoreactive material; the process (3) of acquiring information on the mass of flying ions by using a time-of-flight mass analyzer; and the process (4) of acquiring information on a distribution of the compositions on the base substance based on the information on the mass, acquires the information on the mass of compositions for composing the to-be-analyzed object by using the time-of-flight mass analyzer, and also acquires the information on the distribution of the compositions based on the acquired mass information. COPYRIGHT: (C)2009,JPO&INPIT
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