发明名称 FIN MEMORY STRUCTURE AND METHOD FOR FABRICATION THEREOF
摘要 A semiconductor fin memory structure and a method for fabricating the semiconductor fin memory structure include a semiconductor fin-channel within a finFET structure that is contiguous with and thinner than a conductor fin-capacitor node within a fin-capacitor structure that is integrated with the finFET structure. A single semiconductor layer may be appropriately processed to provide the semiconductor fin-channel within the finFET structure that is contiguous with and thinner than the conductor fin-capacitor node within the fin-capacitor structure.
申请公布号 US2008296648(A1) 申请公布日期 2008.12.04
申请号 US20070755246 申请日期 2007.05.30
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ZHU HUILONG
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
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