| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a probe card structure having ZIF connectors easy to inspect, repair or replace when broken on a probe card while using a new system for connecting recessed portions of the probe card to the ZIF connectors. <P>SOLUTION: The probe card having the ZIF connectors is disclosed which comprises, dominantly, a probe substrate, the plurality of ZIF connectors, and a plurality of removable and adjustable threaded assemblies. The probe substrate in a disc shape has a first surface, a second surface, the plurality of recessed portions installed on the second surface, and a plurality of first through-holes vertically passing through the first surface and the second surface of the substrate. The plurality of first through-holes are annularly arrayed toward the center of the probe substrate, and first electric contacts arrayed in pair are provided on both sides of the plurality of first through-holes in the first surface. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
