发明名称 IMPEDANCE MEASURING CIRCUIT OF FINE CONDUCTIVE REGION AND IMPEDANCE MEASURING METHOD OF FINE CONDUCTIVE REGION
摘要 PROBLEM TO BE SOLVED: To provide an impedance measuring circuit of a fine conductive region capable of separating high frequency input terminal and output terminal and obtaining output signals proportional to the admittance of a single electron transistor without increasing the number of circuit components. SOLUTION: In the fine conductive region 7 where the charge energy of a single electron is almost the same as or more than heat energy at an operation temperature, a tunnel barrier 5 and a tunnel barrier 6 are provided. The tunnel barrier 5 is connected to a first terminal (high frequency input terminal) 1, and the tunnel barrier 6 is grounded through a capacitor 9 and also connected to a second terminal (high frequency output terminal) 3 through an inductor 8. The high frequency signals of a resonance frequency determined by the capacitor 9 and the inductance of the inductor 8 are input to the first terminal 1, and the time dependency of charges in the fine conductive region 7 is measured by the transmission characteristics of the high frequency signals output from the second terminal 3. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008294485(A) 申请公布日期 2008.12.04
申请号 JP20080230166 申请日期 2008.09.08
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 FUJISAWA TOSHIMASA
分类号 H01L29/66 主分类号 H01L29/66
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