| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus in which an O ring of a vacuum partition valve is hardly deteriorated in the charged particle beam apparatus which has a first wall in which a first hole to emit a charged particle beam generated in a charged particle beam generating source is formed and a valve plate which is arranged outside the first wall and on which the O ring capable of contacting with the outside face of the first wall is installed, and has a vacuum sluice valve which holds the inside of the first hole in a vacuum when the O ring contacts with the surrounding of the opening of the first hole outside the first wall and the valve plate closes the first hole of the first wall. SOLUTION: A shielding means (case 211, shield plate 221) 200 to shield scattering electrons, reflecting electrons, X-rays by charged particle beam B is installed between a first hole 103 of the first wall 101 and a valve plate 113 of the vacuum sluice valve 111 in an open state. COPYRIGHT: (C)2009,JPO&INPIT
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