| 摘要 |
PROBLEM TO BE SOLVED: To determine the film thickness of a transparent film to be measured in which the surfaces of a light-transmitting optical member are partially coated with the transparent film through the use of an interferometer. SOLUTION: An object to be measured is made of the light-transmitting optical member of which the surfaces are partially coated with the transparent film. The peak of an interference fringe waveform generated by reflected light of the back surface of the object to be measured and reflected light from a reference surface is detected. The height of the back surface of the optical member is computed through the use of information on the position of the peak then to determine the height of the back surface and the physical film thickness of the transparent film in which the effects of a refractive index of the transparent film is subtracted on the basis of a known refractive index of the transparent film. COPYRIGHT: (C)2009,JPO&INPIT
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