发明名称 METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD
摘要 A manufacturing method of a liquid discharge head having therein liquid discharge ports and liquid flow passageways communicated with the discharge ports, includes: providing, by depositing, on a substrate, lamination of first and second material layers containing first and second positive type photosensitive resins, respectively, first material layer containing a light absorber absorbing a light in a specific wavelength range to which first positive type photosensitive resin is photosensitive, second positive type photosensitive resin able to be photosensitive to the light in specific wavelength range; exposing second material layer to light in specific wavelength range thereby forming a pattern made of material of second material layer; exposing first material layer to light in specific wavelength range thereby forming a pattern made of first material layer; forming a coating layer covering obtained patterns formed on substrate; forming discharge ports in coating layer; and removing patterns to eventually obtain flow passageways.
申请公布号 US2008299497(A1) 申请公布日期 2008.12.04
申请号 US20080120858 申请日期 2008.05.15
申请人 CANON KABUSHIKI KAISHA 发明人 ISHIZUKA KAZUNARI
分类号 G03F7/20 主分类号 G03F7/20
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