PROCESS AND APPARATUS FOR PRODUCING TRICHLOROSILANE AND PROCESS FOR PRODUCING POLYCRYSTALLINE SILICON

摘要

A process for producing trichlorosilane, comprising the conversion reaction step (first reaction step) of carrying out a conversion reaction of raw material tetrachlorosilane and hydrogen within the first temperature range of 1000° to 1900°C to thereby form a first reaction product gas containing trichlorosilane, dichlorosilylene, hydrogen chloride and higher silane compounds; the first cooling step of cooling the first reaction product gas to 950°C or below within 1 sec (excluding cooling to below 600°C within 0.01 sec); the second reaction step of holding the gas within the second temperature range of 600° to 950°C for a period of 0.01 to 5 sec; and the second cooling step of cooling the second reaction product gas after the second reaction step to below 600°C.