发明名称 PLATFORMS, APPARATUSES, SYSTEMS AND METHODS FOR PROCESSING AND ANALYZING SUBSTRATES
摘要 <p>Devices and methods for manufacturing displays, solar panels and other devices using larger size workpieces are provided. The workpiece is rolled into a cylinder, thereby reducing the physical size by a factor of 3 in one dimension. The stages on which the workpieces are rolled have a cylindrical shape, which allows a more robust and/or compact movement of the glass, reduced machine weight. The workpieces are relatively thin, more flexible, and are rolled onto a cylinder with a diameter of about 1 meter. ® KIPO & WIPO 2009</p>
申请公布号 KR20080106261(A) 申请公布日期 2008.12.04
申请号 KR20087022542 申请日期 2007.02.28
申请人 MICRONIC LASER SYSTEMS AB 发明人 SANDSTROM TORBJORN;STIBLERT LARS;LUBEREK JAREK;LOCK TOMAS
分类号 H01L21/027;H05K3/00 主分类号 H01L21/027
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