| 摘要 |
PROBLEM TO BE SOLVED: To reduce a turn around time (TAT) in manufacturing a mask ROM. SOLUTION: The mask ROM includes a plurality of first conductors 105 formed on a substrate 101, an inter-layer insulating film 106 formed on the first conductors 105, a plurality of holes 107 penetrating the inter-layer insulating film 106 to connect to the first conductors 105, a plurality of plugs filling the holes 107, a plurality of second conductors 108 which are formed on the inter-layer insulating film 106 to partially cover respective opening faces of the holes 107, and a protective film 109 formed on the second conductor 108. The protective film 109 has an opening 11 that leads to an area not covered with second conductors 108 on an opening face of at least one of the holes 107. One plug 113 among the plugs 113 that fills at least one hole 107 is electrically isolated from one second conductor 108 among the second conductors 108 that is formed on the upside of the one plug 113. COPYRIGHT: (C)2009,JPO&INPIT
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