MANUFACTURING METHOD OF STAMPER, MANUFACTURING METHOD OF NANOHOLE STRUCTURE, AND MANUFACTURING METHOD OF MAGNETIC RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a stamper by which a rugged pattern on a substrate is not deformed and peeled by a particle suspension when the stamper is manufactured. SOLUTION: The manufacturing method of the stamper includes a rugged pattern forming step for forming a first rugged pattern having projecting parts using a material which is not dissolved in the particle suspension in which particles are suspended, on a substrate, a particle arrangement pattern forming step for immersing the substrate on which the first rugged pattern is formed in the particle suspension to arrange the particles on the surface of the first rugged pattern, a first transfer step for transferring the particle arrangement pattern to form a mold having a reverse pattern of the particle arrangement pattern and a second transfer step for further transferring the pattern formed on the mold to form the stamper having a second rugged pattern. COPYRIGHT: (C)2009,JPO&INPIT