发明名称 |
METHOD AND APPARATUS FOR GENERATING ROOM TEMPERATURE PLASMA AT ATMOSPHERIC PRESSURE |
摘要 |
An atmospheric pressure room temperature plasma generating method and an apparatus are provided to generate the plasma jet using the discharge gas without the limit of gas use. In the atmospheric pressure, a method for generating the room temperature plasma includes the following steps: the step for preparing the three electrodes(10,20,30) to which the respective voltage is applied and has the respective hole; the step for injecting the discharge gas in order to successively pass through the hole of each electrode; the step for jetting the discharge gas through the hole of the third electrode in the form of the jet by generating the plasma.
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申请公布号 |
KR20080105878(A) |
申请公布日期 |
2008.12.04 |
申请号 |
KR20070054013 |
申请日期 |
2007.06.01 |
申请人 |
HONG, YONG CHEOL |
发明人 |
SUNG, HUN SUK;HONG, YONG CHEOL;YI, WON JU |
分类号 |
H01L21/3065;H01L21/205 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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