METHOD AND SYSTEM FOR THIN LAYER COATING BY ELECTROHYDRODYNAMIC PROCESS

摘要

A method and a system for thin film coating are provided to uniformly coat the whole substrate with a thin film finally by using electrohydrodynamic phenomenon. A thin film coating system comprises: a solution feeding part(100) quantitatively feeding a coating solution; a high voltage providing part electrically charging the coating solution such that the coating solution is discharged in the form of continuous micro-wires relative to a substrate; a nozzle part(105) integrally arranged to a high density such that the electrically charged linear coating solutions are reciprocally united to coat the entire substrate uniformly; a pre-treatment part(112) formed in front of the nozzle part to perform pro-electric charge treatment relative to the substrate before discharging the electrically charged coating solution; and a heat-treatment unit(116) formed in rear of the nozzle part to heat and cure the coated substrate. The solution feeding part includes a storage tank(101) storing the costing solution, and a transfer pump(102) connected to the storage tank to pump a fixed quantity of the coating solution toward the nozzle part.