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发明名称
Plasma immersion ion processing for coating of hollow substrates
摘要
申请公布号
AU2008256944(A1)
申请公布日期
2008.12.04
申请号
AU20080256944
申请日期
2008.05.21
申请人
SOUTHWEST RESEARCH INSTITUTE
发明人
RONGHUA WEI;JAMES H. ARPS;CHRISTOPHER RINCON
分类号
C23C16/00;C23F1/00
主分类号
C23C16/00
代理机构
代理人
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