MOVABLE STRUCTURE, OPTICAL SCANNING MIRROR ELEMENT USING THE SAME AND METHOD OF MANUFACTURING MOVABLE STRUCTURE

摘要

PROBLEM TO BE SOLVED: To improve vibration-resistance performance and anti-shock performance by constituting so that the hinge part of a movable structure is hardly broken even when a vibration or a shock is applied thereto. SOLUTION: An optical scanning mirror element 1 as the movable structure is composed so as to rockably pivotally support a movable plate 2 on a frame part 4 with two hinge parts 3. Side stoppers 8a which are substantially horizontally projected toward the movable plate 2 from the frame part 4 are provided in the near parts of both side parts of the respective hinge parts 3. Lower stoppers projected from the frame part 4 are provided under the hinge parts 3. When the vibration or the shock is given from outside, the hinge parts 3 touches to the side stoppers 8a and the lower stoppers to prevent an abnormal displacement of the movable plate 2, so that the breakage of the hinge parts 3 is prevented. COPYRIGHT: (C)2009,JPO&INPIT