| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a compact fluid apparatus unit structure proper for a use of taking out chemicals in response to the necessity, while circulating chemicals and water, and capable of preventing solidification of fluid such as chemicals. <P>SOLUTION: In this fluid apparatus unit structure FU having a plurality of fluid apparatuses connected to each other through a flow path and piled in a base member 10 for integration, a connecting flow path 15 connecting between a pneumatic operation valve 20A and a manual operation valve 30A adjacent to each other, while forming a first chemical flow-out path for circulating the chemicals, is offset from the shaft center of the fluid apparatuses. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
