| 摘要 |
PROBLEM TO BE SOLVED: To prolong life of cleaning fluid by preventing cleaning time from becoming longer for a cleaning apparatus that cleans things, which are allowed to skip pure water cleaning. SOLUTION: This cleaning dryer apparatus comprises an exterior container 14; an interior container 38 arranged inside the exterior container 14, wherein cleaning fluid is stored and an opening from which things to be cleaned W can be entered and taken out; a pressure reduction means 20 for reducing pressure inside the exterior container 14 so that cleaning fluid attached to the things to be cleaned W may be evaporated; a filter 58 for purifying cleaning fluid; and a lid 52 for sealing the opening of the interior container 38 hermetically. COPYRIGHT: (C)2009,JPO&INPIT
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