| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for producing a nanoimprint sheet which can transfer an uneven pattern on the outer peripheral surface of a roll to a resin sheet with high accuracy, and particularly enables the production of a nanoimprint sheet having a pitch of an uneven pattern in submicron regions with high productivity. SOLUTION: The nanoimprint sheet-producing device 1 includes: an imprint roll 10 in which a resin sheet A is wound and adhered onto a part of its outer peripheral surface 10a on which the uneven pattern 10b is formed; a heater 20 for heating a portion of the resin sheet A beginning to adhere to the roll 10; and a peeling roll 40 for peeling off the resin sheet A adhered to the outer peripheral surface 10a of the imprint roll 10, and further is provided with a cooler 30 for spraying with cool air or cold water to the sheet A from its outside. COPYRIGHT: (C)2009,JPO&INPIT
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