发明名称 MOSFET-type semiconductor device, and method of manufacturing the same
摘要 A MOSFET-type semiconductor device includes a monocrystalline semiconductor layer formed in a shape of a thin wall on an insulating film, a gate electrode straddling over the semiconductor layer around the middle portion of the wall-shaped semiconductor layer via a gate insulating film, source and drain regions formed at the both ends of the semiconductor layer, a first metal-semiconductor compound layer formed on one of the side walls of each of source and drain regions of the semiconductor layer, and a second metal-semiconductor compound layer having a different composition and Shottky barrier height from that of the first metal-semiconductor compound layer on the other side wall of each of source and drain regions of the semiconductor layer.
申请公布号 US2008299719(A1) 申请公布日期 2008.12.04
申请号 US20080222146 申请日期 2008.08.04
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 TSUCHIAKI MASAKATSU
分类号 H01L21/336 主分类号 H01L21/336
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