DATA DISPLAY, DATA DISPLAY METHOD, AND PROGRAM

摘要

[PROBLEMS] To solve a problem that time-series data such as data measured from a semiconductor process cannot be properly displayed in a conventional data display or the like. [MEANS FOR SOLVING PROBLEMS] A data display comprises a first display section (1307) for displaying a plurality of sets of process-related data which are time-series sets of data on the state when a semiconductor process is processed in a first display width in association with a time axis, a range specification receiving section (1308) for receiving the specification of a range to be displayed, which is the range of part of the process-related data displayed by the first display section (1307), and a second display section (1310) for acquiring process-related data in a display period which is the period corresponding to the range to be displayed from each of the sets of the process-related data and displaying it in a second display width wider than the width of the range to be displayed in association with the time axis. Information on the range to be displayed indicated by the first display section (1307) is displayed in association with one or more sets of the process-related data displayed by the first display section (1307).