WET SCRUBBER SYSTEM

摘要

A wet scrubber system capable of collecting the water soluble toxic gas in the wasted gas easily is provided to improve the correction efficiency of the toxic gas by increasing the contact time between the wasted gas and water. The wet scrubber system(10) processing the wasted gas in the semiconductor process comprises the tower housing(110), the first blow nozzle(130), the wet tower(100), the tank housing(210), the supply pump(230), the water supply part(200). The tower housing comprises the wasted gas inlet port(120) into which the wasted gas is flowed. The tower housing is formed with the box type. The first blow nozzle sprays the water to the inside of the tower housing. The wet tower comprises an plurality of dispersive rods(140) arranged in the lower part of the first blow nozzle in the horizontal direction. The tank housing comprises the inlet port and the outlet port. The tank housing is formed with the box type. The supply pump supplies the water of the tank housing to the first blow nozzle. The water supply part comprises the first supply tube(235) connecting the supply pump and the first blow nozzle.