| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state imaging device etc., having a condensing element capable of condensing incident light at high efficiency by improving reproducibility of a refractive index distribution at a peripheral part of a pixel. SOLUTION: The solid-state imaging device have pixels, each of the pixels (5.6 mm square in size) being composed of the condensing element 1, a color filter, a light shield layer (Al wiring) 3, a photodetecting element (Si photodiode) 4, an Si substrate 5, and a flattened layer 6. A concentric rectangular structure is made of SiO<SB>2</SB>(n=1.43) as a high-refractive-index material 12, and has a two-stage structure of 1.2μm, 0.8μm, and 0μm in film thickness. Further, the condensing element 1 has a concentric rectangular structure formed by concentrically digging SiO<SB>2</SB>, and a circumferential medium is air (n=1.0). Further, a region other than the high-refractive-index material forming the condensing element 1 is air 11. COPYRIGHT: (C)2009,JPO&INPIT
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