METHOD FOR PRODUCING AMORPHOUS CARBON FILM, AND PRODUCTION APPARATUS THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method for easily producing an amorphous carbon film having desired band-gap energy, and to provide a production apparatus therefor. SOLUTION: The method for producing the amorphous carbon film having the desired band-gap energy includes intermittently irradiating a source gas (G) which grows to the amorphous carbon film with a pulsed microwave (W) having a duty ratio corresponding to predetermined band-gap energy to form the plasma (P) of the source gas (G) and form the amorphous carbon film on a substrate (B). COPYRIGHT: (C)2009,JPO&INPIT