VACUUM FILM-FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method having a step of stably depositing a sublimated material on a synthetic resin film so as to improve characteristics of a sublimated material film to be formed on the synthetic resin film. SOLUTION: This film-forming method includes preliminarily and uniformly heating a sublimating material by using a microwave-generating means. The sublimating material to be irradiated with an electron beam emitted from an electron beam generating means has an approximately smooth surface. A material container is movable. A mesh-shaped filter made from a refractory material is provided in between the material container and a cooling roller. COPYRIGHT: (C)2009,JPO&INPIT