| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating film forming apparatus capable of reducing the mutual interference of aerosol when discharging the aerosol from a nozzle to a base material having a circumferential curved surface. SOLUTION: The coating film forming apparatus 4 performs coating film forming by discharging aerosol, where particles are dispersed in a gas from aerosol discharging nozzles, onto the base material 8 having the circumferential curved surface in a vacuum chamber 5 and causing the particles to collide with the base material 8, wherein the plurality of aerosol discharging nozzles 1a, 1b, 1c, 1d and 1e are provided, and allocated and disposed on the circumference of the radial section of the base material 8 so that at least one or more nozzles do not overlap, and the nozzles discharge the aerosol at the same time. COPYRIGHT: (C)2009,JPO&INPIT
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