发明名称 ACOUSTIC WAVE DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 A surface acoustic wave device includes a piezoelectric substrate, at least one interdigital transducer (IDT) electrode provided on the piezoelectric substrate, and an insulator layer to improve a temperature characteristic arranged so as to cover the IDT electrode. When a surface of the insulator layer is classified into a first surface region under which the IDT electrode is positioned and a second surface region under which no IDT electrode is positioned, the surface of the insulator layer in at least one portion of the second surface region is higher than the surface of the insulator layer from the piezoelectric substrate in at least one portion of the first surface region by at least about 0.001lambda, where the wavelength of an acoustic wave is lambda.
申请公布号 US2008296999(A1) 申请公布日期 2008.12.04
申请号 US20080191451 申请日期 2008.08.14
申请人 MURATA MANUFACTURING CO., LTD. 发明人 KIDO SHUNSUKE;NAKAO TAKESHI;NAKAI YASUHARU;NISHIYAMA KENJI;KADOTA MICHIO
分类号 H01L41/04;H01L41/22 主分类号 H01L41/04
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