| 摘要 |
A particle removing device for a clean room is provided to remove the particles generated from the clean room by moving the particle removing device along the guide rail automatically. A particle removing device for a clean room(1) comprises the guide rail(10), the main body(100), the lift pump(200), the suction tube(300), and the suction probe(400). The guide rail is installed inside the clean room and forms the fixed route. The main body is installed in the guide rail. The main body moves along the route. The absorption pump is installed at the inner part of the main body. The absorption pump includes the built-in pump. One end of suction tube is connected to the absorption pump. The other end of suction tube is connected to the main body outside. The suction probe is connected to the other end of the suction tube. The suction probe inhales the particles of the clean room inside.
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