| 摘要 |
PROBLEM TO BE SOLVED: To provide a monochromator used for an electron microscope. SOLUTION: The monochromator for a charged particle optics, in particular, used for the electron microscope, comprises at least one first deflection element (2, 3) with an electrostatic deflection field (2', 3') for generating a dispersion (4) in the plane (5) of a selection aperture (6) for selecting the charged particles of the desired energy width (7), and at least one second deflection element (8, 9) with an electrostatic deflection field (8', 9') which eliminates the dispersion (4) of at least one first deflecting field (2', 3'). COPYRIGHT: (C)2009,JPO&INPIT |
