发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor device according to an embodiment of the present invention includes a first gate insulator, a first gate electrode, a second gate insulator, and a second gate electrode. Regarding the thickness of the second gate insulator, the thickness of the insulator, on a first edge of the first gate electrode in the word-line direction, and the thickness of the insulator, on a second edge of the first gate electrode in the word-line direction, are larger than, the thickness of the insulator, on the upper surface of the first gate electrode, the thickness of the insulator, on the first side of the first gate electrode in the word-line direction, and the thickness of the insulator, on the second side of the first gate electrode in the word-line direction.
申请公布号 US2008296663(A1) 申请公布日期 2008.12.04
申请号 US20080113245 申请日期 2008.05.01
申请人 TAKEUCHI WAKAKO;AKAHORI HIROSHI 发明人 TAKEUCHI WAKAKO;AKAHORI HIROSHI
分类号 H01L29/792;H01L21/28 主分类号 H01L29/792
代理机构 代理人
主权项
地址