发明名称 Assembling Two Substrates by Molecular Adhesion
摘要 The invention relates to an assembly method to enable local electrical bonds between zones located on a face of a first substrate and corresponding zones located on a face of a second substrate, said faces being located facing each other, at least one of the substrates having a surface topography, characterised in that the method comprises steps consisting of: forming an intermediate layer comprising at least one burial layer on the face of the substrate or substrates having a surface topography to make it (them) compatible with molecular bonding of said faces of substrates to each other from a topographic point of view, the resistivity and/or thickness of the intermediate layer being chosen to enable said local electrical bonds, bringing the two faces into contact, the substrates being positioned so as to create electrical bonds between areas located on the first substrate and the corresponding areas located on the second substrate, bonding the faces of the first and second substrates by molecular bonding.
申请公布号 US2008296712(A1) 申请公布日期 2008.12.04
申请号 US20050630283 申请日期 2005.06.29
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 FEUILLET GUY;MORICEAU HUBERT;POCAS STEPHANE;JALAGUIER ERIC;NORBERT MOUSSY
分类号 H01L21/50;H01L33/00 主分类号 H01L21/50
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