发明名称 MICROCHIP AND METHOD OF MANUFACTURING MICROCHIP
摘要 A microchip formed by joining a first substrate having at least one recess on its surface and a second substrate, wherein small projections of 0.5 to 30 mum in height are formed on at least a part of the surface having the recess of the first substrate, and a coating formed of a surface processing agent is provided on at least a part of the surface having the small projections formed thereon, as well as a method of manufacturing the microchip, are provided. A microchip allowing easy inspection of the state of application or state of adhesion of liquid material such as a surface processing agent, and allowing accurate optical measurement without causing disturbance such as fluorescence, can be provided.
申请公布号 US2008296734(A1) 申请公布日期 2008.12.04
申请号 US20080129869 申请日期 2008.05.30
申请人 ROHM CO., LTD. 发明人 MOMOSE SHUN
分类号 H01L29/06;H01L21/66 主分类号 H01L29/06
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