发明名称 ADVANCED PROBE PIN FOR SEMICONDUCTOR TEST
摘要 <p>An advanced probe pin for a semiconductor test, capable of electrically testing normality of a semiconductor device through contact with the semiconductor device, is disclosed. In a probe card which is a semiconductor testing apparatus, the probe pin includes a beam unit including a fixing supporting part additionally formed at an outside of the probe pin and a pin unit establishing an area-contact with a wafer chip of a semiconductor, the beam unit and the pin unit being separately manufactured and then integrated. According to the above structure, connection and separation of the pin unit with respect to the beam unit can be performed promptly and conveniently.</p>
申请公布号 WO2008147084(A1) 申请公布日期 2008.12.04
申请号 WO2008KR02930 申请日期 2008.05.26
申请人 SONG, KWANG SUK;SONG, WON HO 发明人 SONG, KWANG SUK;SONG, WON HO
分类号 H01L21/66 主分类号 H01L21/66
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