LITHOGRAPHIC APPARATUS HAVING ENCODER TYPE POSITION SENSOR SYSTEM

摘要

PROBLEM TO BE SOLVED: To increase the position accuracy of an encoder type sensor system of a lithographic apparatus.

SOLUTION: A lithographic apparatus is disclosed that includes an encoder type sensor system configured to measure a position of a substrate table of the lithographic apparatus relative to a reference structure. The encoder type sensor system includes an encoder sensor head and an encoder sensor target and the lithographic apparatus comprises a recess to accommodate the encoder sensor target.

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