| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microstructure formed simply by using lithography, a method for manufacturing the microstructure, a substrate patterning method using the microstructure, a structure having the microstructure, an information recording medium, a master record, an optical element, an optical communication apparatus, a DNA chip, a light-emitting element, a photoelectric conversion element and an optical lens. <P>SOLUTION: The microstructure contains sulfur compound and silicone oxide. The method for manufacturing the microstructure includes a step of forming a layer containing the sulfur compound, the silicone oxide and a material which can improve the light absorbency on the substrate, a step of radiating a laser beam on the layer formed on the substrate, and a step of etching the layer on which the laser light has been irradiated. <P>COPYRIGHT: (C)2009,JPO&INPIT |
