| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition having high radiation sensitivity, being excellent in dimensional accuracy and strength even with low exposures, preventing separation of patterns during a developing process and a rubbing process, and preventing formation of sublimates during a heating process. <P>SOLUTION: The radiation-sensitive resin composition contains: (A) a copolymer of (a1) at least one kind selected from the group consisting of an unsaturated carboxylic acid and an unsaturated carboxylic acid anhydride and (a2) another unsaturated compound; (B) a polymerizable unsaturated compound; (C) a radiation-sensitive polymerization initiator; (D) and a compound having a structure represented by formula (1) wherein "*" represents a bond. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
