| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer device capable of reducing an occupied area specific to the transport device and realizing stable high speed transport which will not be effected by size increase/diversification of the substrate size. SOLUTION: The substrate transfer device comprises at least a stage 10, a wire supply head 20, a wire extension head 30, a first drive shaft 40 for moving the wire extension head 30 at right angles to the transfer direction for extending a wire, and second drive shafts 50a, 50b for moving the wire supply head 20 and the wire extension head 30 in the transfer direction. COPYRIGHT: (C)2009,JPO&INPIT
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