| 摘要 |
PROBLEM TO BE SOLVED: To provide a loading device for polishing the end surface of a workpiece. SOLUTION: This loading device for polishing the end surface of a workpiece comprises a body and a frame. A plurality of clamping tools are joined to the loading device for clamping the workpiece to be polished to the body. An annular first support part is formed around the body. The frame has a second support part. The second support part surrounds the outer surface of the first support part. In the polishing step of bringing the end surface to be polished of the workpiece into contact with a polishing surface, the second support part restricts the displacement range of the first support part, and maintains the body in the state parallel to the polishing surface. Consequently, a time and a cost for manufacturing the first support part can be remarkably reduced. COPYRIGHT: (C)2009,JPO&INPIT
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