发明名称 |
TRANSISTOR, INTEGRATED CIRCUIT AND METHOD OF FORMING AN INTEGRATED CIRCUIT |
摘要 |
A transistor, an integrated circuit and a method of forming an integrated circuit is disclosed. One embodiment includes a gate electrode. The gate electrode is disposed in a gate groove formed in a semiconductor substrate and includes a conductive carbon material.
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申请公布号 |
US2008296674(A1) |
申请公布日期 |
2008.12.04 |
申请号 |
US20070755141 |
申请日期 |
2007.05.30 |
申请人 |
QIMONDA AG |
发明人 |
GRAHAM ANDREW;HARTWICH JESSICA;SCHOLZ ARND |
分类号 |
H01L29/78;H01L21/336 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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