| 摘要 |
A method of producing at least one liquid delivering apparatus (6) which delivers a liquid from at least one liquid chamber (16) thereof to a location outside the at least one liquid delivering apparatus, by deforming a piezoelectric element (20b) thereof provided at a location opposed to the at least one liquid chamber and thereby applying a pressure to the liquid in the at least one liquid chamber. The method comprises the steps of stacking a first sheet member (14) having at least one opening (16) defining the at least one liquid chamber and a second sheet member (20a) covering the at least one opening, on each other, so as to provide an integral, stacked body (20); forming, of a material of the piezoelectric element, a layer (20b) on at least a portion of the second sheet member of the stacked body that is opposed to the at least one opening of the first sheet member of the stacked body; and annealing the layer formed on the stacked body, and thereby crystallizing the material of the layer, so as to change the layer into the piezoelectric element. <IMAGE> |
