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发明名称
摘要
申请公布号	JP4191295(B2)	申请公布日期	2008.12.03
申请号	JP19980341659	申请日期	1998.12.01
申请人		发明人
分类号	G01B11/00;H01L23/12;G01N21/88;G01N21/956;H01L21/60	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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