摘要 |
<p>The invention relates to a piezoelectric actuator and to a method for producing a piezoelectric actuator (20, 70) having a piezo stack (1'', 1''') and two outer electrodes (11, 12, 11', 12') which are arranged on the outside (5) of the piezo stack (1'', 1'''). A fully active piezo stack (1) comprising a plurality of alternately successive piezoelectric layers (2) and continuous inner electrode layers (3, 4) is first of all provided. The outside (5) of the fully active piezo stack (1) is provided with trenches (7, 8) in regions in which the inner electrode layers (3, 4) are intended to be electrically insulated from the outer electrodes (11, 12, 11', 12'), with the result that the trenches (7, 8) shorten the inner electrode layers (3, 4) in these regions from the outside (5) of the piezo stack (1) inwards. The trenches (7, 8) are then filled with an electrically insulating material (9) and the two outer electrodes (11, 12, 11', 12') are applied to the outside (5) of the piezo stack (1'', 1'''), with the result that the two outer electrodes (11, 12, 11', 12') are alternately electrically connected to the inner electrode layers (3, 4).</p> |