The substrate mounting apparatus is provided to prevent the contamination and damage caused by other substrates which are loaded in a slot by transferring a specific slot among the cassette having a plurality of slots. The substrate mounting apparatus comprises the frame(10), the cassette(30), the elevating unit(20), the drive unit(50). The cassette includes a plurality of slots(31) in which substrate is loaded. The elevating unit elevates the cassette. The drive unit is horizontally moved to the slot of cassette to transfer the substrate when transferring the substrate loaded in the cassette. The contamination and damage caused by other substrates can be prevented.
