| 摘要 |
An electron column utilizing the CNT tip and a method for arranging the CNT tip are provided to induce the electron emission at the electron column easily. An electron column including the emitter(10) and electromagnetic lens(20) use the CNT for the electron emission. The CNT is attached or deposited at the end of the supporting part including CFE, TFE OR TE. The electronics column is the multi-type wafer type. The CNT is formed on the wafer plane. The CNT is formed on the sharp end of the supporting part of the wafer. The sharp end of the supporting part of the wafer is arranged with the electronic lens.
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