NANO-LITHOGRAPHY APPARATUS AND METHOD IN SCANNING PROBE MICROSCOPE

摘要

The lithography apparatus and method of the probe microscope are provided to generate the signal for the nanostructures manufacture in the location which a user wants by outputting the respective digital lithography signal or the analog lithography signal. The lithography apparatus of the probe microscope comprises the information input unit(11), and the output control. The information input unit receives the information for manufacturing the nanostructures to the sample. The information input unit receives the digital or the analog location information of sample. The output control outputs digital produces the respective digital lithography control signal or the analog lithography signal according to the set-up lithography algorithm and the output control outputs digital or the analog location information of the sample selected according to the location information input method of the sample.