摘要 |
<p>In a gas flowmeter in which a rod and a sensor element are formed as a single body, for preventing heat of the sensor element from flowing into a sensor probe through a substrate (rod) so as to suppress considerable power consumption, and for obtaining a necessary response speed with respect to a flow rate of gas to be measured or a change in temperature, the gas column (rod) is made of an insulating material on a center axis of the sensing probe and is formed with a conductor pattern on its surface, and the sensing probe connects the sensor element disposed in a pipe through which the gas to be measured flows and a harness terminal through the conductor on the surface of the rod, so as to measure a gas flow rate by using the sensing prove.</p> |